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Foundations of MEMS /

Liu, C

Foundations of MEMS / Chang Liu. - Upper Saddle River, NJ : Pearson/Prentice Hall, 2006. - xxii, 530 p. : ill. ;Hbk

ISBN: 0131472860

Subjects--Topical Terms:
Microelectromechanical systems.

LC Class. No.: TK7875 / .L4 2006

Dewey Class. No.: 621.3

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