Liu, C <br/><br/>
Foundations of MEMS / 
Chang Liu. 
 - Upper Saddle River, NJ :  Pearson/Prentice Hall,  2006. 
 - xxii, 530 p. :  ill. ;Hbk 
<br/><br/><label>ISBN: </label>0131472860 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .L4 2006 
<br/><br/><label>Dewey Class. No.: </label>621.3