TY  - BOOK
AU  - Liu,C
TI  - Foundations of MEMS
SN  - 0131472860
AV  - TK7875 .L4 2006
U1  - 621.3 
PY  - 2006///
CY  - Upper Saddle River, NJ
PB  - Pearson/Prentice Hall
KW  - Microelectromechanical systems
ER  -